UHV cylindrical chamber.  21.5" Inside diameter, 21” Height
4 CF10" side ports
1 CF10 Top port
4 CF 2 3/4" Ports Top 1 CF8 Port Bottom
6 Ports CF 2 3/4 Bottom 2 Ports CF 2 3/4 Bottom 4 Ports CF 2 3/4 Side 2 Ports CF 1 1/3 Side.
 
Marca/Brand: MKS